DC power supply for sputtering 'GEXUS'
Evolving high performance and high reliability! A DC power supply that adopts a multi-stage inverter method and achieves extremely low arc energy.
"GEXUS" is a DC power supply for sputtering that adopts a multi-stage inverter system, achieving extremely low arc energy. It offers a wide range of outputs from 1.5kW to 20kW. By operating multiple units in tandem, it is possible to achieve a maximum output of 240kW. Additionally, there is a 3kW DC power supply for sputtering, "GEXUS-H3A," which realizes low output starting from 30W. It can be used for various film deposition applications including semiconductors, power devices, and SiC. 【Features】 ■ High reliability, low failure rate ■ High-speed arc extinguishing device available as an option ■ High-speed interruption during arcing (interruption within 1us) ■ Low arc energy (less than 1mJ/kW) *For more details, please download the PDF or feel free to contact us.
- 企業：オリジン
- 価格：Other
